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Anonymous
Anonymous asked in 科學化學 · 1 decade ago

Fab內PM過後的powder要如何處理?

機台PM過後 細微powder粒徑<3um要怎樣處理??

可以用house vacuum清除到廠務端嗎?

如果可以那house vacuum末端要加裝洗滌塔嗎?

1 Answer

Rating
  • NANA
    Lv 4
    1 decade ago
    Favorite Answer

    在Fab裡的細微particle最好的清除方法還是利用vacuum吸除到廠務端.

    一般在廠務端的排氣口都會裝filter, 就像吸塵器裡的集塵袋一樣, 所以不用擔心particle會外洩, 也不需要因此大費周章地加裝洗滌塔.

    以上意見提供您參考!

    Source(s): 自己
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