Yahoo Answers is shutting down on May 4th, 2021 (Eastern Time) and beginning April 20th, 2021 (Eastern Time) the Yahoo Answers website will be in read-only mode. There will be no changes to other Yahoo properties or services, or your Yahoo account. You can find more information about the Yahoo Answers shutdown and how to download your data on this help page.

阿賢 asked in 科學其他:科學 · 2 decades ago

何謂「正光罩」、「負光罩」?

記得上次在一個研討會中

好像有聽過正光罩、負光罩

請問有人知道相關的知識嗎?

最好是可以說明一下~ 它們的差別在那?

1 Answer

Rating
  • 2 decades ago
    Favorite Answer

    我想你可能聽錯了吧研討會講的應該是指"正光阻"與"負光阻"我現在在做光電半導體製程沒有聽過正光罩與負光罩光罩一般都只有一種以下我簡單介紹一下兩種光阻正光阻在紫外光照射後,其鍵結被打斷,在顯影時即被溶掉,未曝光部分則存留,形成耐酸性腐蝕之保護膜。負光阻則相反,受紫外光照射後期鏈結才形成,顯影時則被保留,未曝光部分則被溶掉。 正光阻具有較佳之解析度(resolution)及較明顯的對比(contrast)因而可得到較細的線寬(line width)而為業界所樂用,但需要在相對溼度為45﹪~ 50﹪之環境下才能獲得良好之黏附性(adhesion),否則就容易剝落。反之,負光阻就不會如此嬌弱,雖然在溼度較高的環境下仍能使用,故為一般學校或學術單位採用。

    Source(s): 個人經驗
Still have questions? Get your answers by asking now.