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In the package thermal verification and model generation practice it is frequently needed to know the exact value of the time dependence of the heat flux crossing a certain surface.For these purposes such a heat-flow sensor is needed that is representing a sufficiently small thermal resistance and thermal... show more In the package thermal verification and model generation practice it is frequently needed to know the exact value of the time dependence of the heat flux crossing a certain surface.For these purposes such a heat-flow sensor is needed that is representing a sufficiently small thermal resistance and thermal capacitance, not to disturb considerably the heat flow in the usual microelectronic structures.

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