Yahoo Answers is shutting down on May 4th, 2021 (Eastern Time) and beginning April 20th, 2021 (Eastern Time) the Yahoo Answers website will be in read-only mode. There will be no changes to other Yahoo properties or services, or your Yahoo account. You can find more information about the Yahoo Answers shutdown and how to download your data on this help page.

澎澎 asked in 科學化學 · 2 decades ago

PVD CVD MOCVD之原理及應用

PVD CVD MOCVD之原理及應用和金屬薄膜鍍著方法

包刮中文名稱

希望越詳細越好~~

星期一就要了~

拜託各位高手們!

2 Answers

Rating
  • 2 decades ago
    Favorite Answer

    薄膜沈積依據沈積過程中,是否含有化學反應的機制,可以區分為物理氣相沈積(Physical Vapor Deposition,簡稱PVD)通常稱為物理蒸鍍及化學氣相沈積(Chemical Vapor Deposition,簡稱CVD)通常稱為化學蒸鍍。

    物理氣相沈積(物理蒸鍍)(PVD)

    PVD顧名思義是以物理機制來進行薄膜湚積而不涉及化學反應的製程技術,所謂物理機制是物質的相變化現象,如蒸鍍(Evaporation),蒸鍍源由固態轉化為氣態,濺鍍(Sputtering),蒸鍍源則由氣態轉化為電漿態。

  • 2 decades ago

    試試這裡吧:

    表面處理技術:

    http://tw.myblog.yahoo.com/jw!EOUWG0WRGBKHrRDl8JmG...

Still have questions? Get your answers by asking now.