Anonymous
Anonymous asked in 科學化學 · 2 decades ago

電子材料的製程問題

說明以下製程:

Chemical Vapor Deposition (CVD)

Vapor Phase Epitaxy(VPE)

Molecular Beam Epitaxy(MBE)

Sputter Method(SM)

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  • 2 decades ago
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    Chemical Vapor Deposition (CVD)

    化學氣相沉積------將氣體反應成固體(薄膜)鍍在被鍍物上.

    Vapor Phase Epitaxy(VPE)

    與上述相仿,但沉積速度較慢,排列較整齊.

    Molecular Beam Epitaxy(MBE)

    分子束磊晶----------超高真空環境下,蒸發或裂解材料(source),鍍(習慣上會用"長"這個字)在基板(Substrate)上.

    Sputter Method(SM)

    濺鍍-------有種運動叫做 "爬文",有人回答的很詳細,去找找看.

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